
Dominique ABESSOLO ONDO - Luxembourg Institute of Science and Technology, Luxembourg (LU)
Oral #DEPO4-O2-022 - Atmospheric-pressure synthesis of atomically smooth, conformal, and ultrathin low-k polymer insulating layers by plasma-initiated CVD

Gaëlle ANTOUN - GREMI, Université d'Orléans (FR)
Oral #SURF2-O1-026 - Atomic Layer Etching at cryogenic temperature

Alexis Carlos GARCÍA WONG - Institut Jean Lamour, Nancy (FR)
Oral #DEPO1-O3-048 - Thermochromic VO2 films obtained by the oxidation of reactively sputter-deposited VN in a semi-industrial machine