Process control 3

Thursday, September 14, 2023

PROC • PROC 3 • 9:25 AM > 10:05 AM • Process control 3 • Antipolis Auditorium PROC

9:25 AM • PROC3-O1-061 • Investigation of ionized metal flux fraction at industrial conditions > P. Petr VAŠINA 9:45 AM • PROC3-O2-071 • Study of the ion energy distribution in the ALE process of GaN > T. Thomas TILLOCHER

PARTNERS AND SPONSORS