Outgassing, Pumps, Getters and Materials Processing / Poster session #1

Tuesday, September 10, 2013
VST - Vacuum Science and Technology VST-P1 2:00 PM > 4:00 PM Outgassing, Pumps, Getters and Materials Processing / Poster session #1 Poster Area 1 (Halls) VST - Vacuum Science and Technology

VST-P1-16 A profile of the gradational lead rotor with equal axial addendum width in dry twin-screw vacuum pump > S. Shiwei ZHANG VST-P1-17 Effect of sealing time of anodic aluminum oxide (AAO) film for vacuum parts > J-T. Jin-Tae KIM VST-P1-18 Large-scale Hydro-formed Bellows with Inner-surface Polishing, as Flexible as Welded Bellows > K. Koizumi Oji VST-P1-19 Evaluation Design of Reliability Engineering of Vacuum Pumps in the Semi-conductor Industry > J. Jong Yeon Lim VST-P1-20 Study on Diagnostics of Dry Vacuum Pumps Using the Adaptive Parametric Model of State Variables > S. Seunghwan Nam VST-P1-21 Cancelled VST-P1-22 Absorption of noble gases by sputter-ion pumps: investigating synergetic pumping mechanisms for a better integration with non-evaporable getters > T. Tommaso Porcelli VST-P1-23 Vacuum performance of glassy carbon > P. Paolo Chiggiato

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