Short courses
Courses on plasma science and technology will be delivered for three half-days prior to the CIP-MIATEC’2017 Conference.
These introductory courses will span topics ranging from basics of plasma physics and plasma surface interactions to plasma assisted deposition and etching processes, including their application in microelectronics, micro-nanotechnology, biomaterials and biosensors.
 Program
 |
An introduction to non-equilibrium gas discharges
Kinga Kutasi
Institute for Solid State Physics & Opics, Wigner RCP of the HAS, HU
W ebpage
|
 |
Evaluation and control of the tribo-mechanical properties of vapor-deposited coatings and thin films
Etienne Bousser
Univ. Manchester, UK
Webpage /  Summary
|
 |
Stress evolution during thin film growth
Grégory Abadias
Institut P', Univ. Poitiers, FR
Webpage / Summary
|
 |
Plasma diagnostics: a multi-purpose tool box to get plasma parameters
Gérard Henrion
IJL, Univ. Lorraine, CNRS, Nancy, FR
Summary
|
 |
Plasma chemistry, plasma surface interaction, and thin film deposition in PECVD
Jan Benedikt
Ruhr-Univ. Bochum, DE
Webpage
|
 |
Magnetrons - case study of magnetized plasmas
Tiberiu Minea
LPGP, Univ. Paris Sud, Orsay, FR
Summary
|
|